Implement FDC process control & reduce yield loss excursions and improve CPK
See up to 40% reduction in excursions & over 20% CPK improvement. This industry-leading solution for FDC at IDMs, Foundries, Assembly, & Substrate Fabs enables identification, diagnoses, and prevention of tool problems at the tool. When linked with SAP ERP you can dynamically track production costs
Overview
Reduce tool and process-induced variability with FDC
Links tool sensor FDC and MES data, providing SPC (statistical process control) charts and OCAPs (out-of-control action plans) for early detection and alarming of abnormal process variation. Reduce scrap by over 40% and improve process capability by identifying bad behavior.
Ramp new tools and factories faster
Shorten tool and factory qualification time by over 50% by matching new equipment to proven equipment at the sensor level. Enable copy of exact process transfers to other fabs and factories by matching processes exactly. Shown to improve new product ramp time by over six months.
Improve product yield and reliability
Enables advanced capabilities like AI/ML MV modeling, virtual metrology, and linking upstream/downstream data to gain additional insights into critical operational KPIs, yield, and reliability. Enables 'Smart Control Plans' where SPC limits are placed on the key sensors at the tool to minimize loss.
Details
Solution type
APIs and Technical Components
Industry
Consumer Products, Automotive, Defense and Security
Compatibility
Works with
Features
Collect sensor FDC data for better tool control
Equipment FDC data collection through HSMS/SECS/GEM/EDA/Interface-A/OPC and other SEMI standard interfaces. Multi-frequency data collection capabilities with out-of-the-box solutions for most 200 and 300mm tools. Integrates with MES systems for real time misprocess alarm & dispositioning of product.
Extract important features with Filter Plans for better tool control
Extract the meaningful information from your FDC time series sensor trace data with Filter Plans that automate the feature extraction and create version-controlled control plans.
Monitor the factory with interactive dashboards for fast issue response
The most flexible and interactive reporting and dashboarding framework in the industry. Native support for integration with HTML, Iron Python, R, Javascript, and more allows customization capability and flexibility. Automation Services and Webplayer allow for viewing dashboard/reports in-browser.
Plans and pricing
Process Control
Equipment FDC real time data collection from SEMI standard compliant tools (SECS/GEM/EDA/OPC...)
Tool and process variability reduction by applying SPC monitoring of the FDC signals
Real-time automated OCAP disposition at the tool (alarm, hold lot, hold wfr, etc;) w/MES connectivity
Combine with Manufacturing Analytics to enable YA-FDC (Yield Aware) solutions & diagnostics
Advanced Analytics & Response Modeling for Virtual Metrology, Predictive PM's, AI/ML Modeling
Includes 1 Equipment Price upon requestEquipment FDC real time data collection from SEMI standard compliant tools (SECS/GEM/EDA/OPC...)
Tool and process variability reduction by applying SPC monitoring of the FDC signals
Real-time automated OCAP disposition at the tool (alarm, hold lot, hold wfr, etc;) w/MES connectivity
Combine with Manufacturing Analytics to enable YA-FDC (Yield Aware) solutions & diagnostics
Advanced Analytics & Response Modeling for Virtual Metrology, Predictive PM's, AI/ML Modeling
Includes 1 Equipment Recurring Edition
Equipment FDC real time data collection from SEMI standard compliant tools (SECS/GEM/EDA/OPC...)
Tool and process variability reduction by applying SPC monitoring of the FDC signals
Real-time automated OCAP disposition at the tool (alarm, hold lot, hold wfr, etc;) and MES connectivity
Includes 1 Equipment Per YearUSD 2,675.00- USD per Equipment
- Minimum contract 1 year
Equipment FDC real time data collection from SEMI standard compliant tools (SECS/GEM/EDA/OPC...)
Tool and process variability reduction by applying SPC monitoring of the FDC signals
Real-time automated OCAP disposition at the tool (alarm, hold lot, hold wfr, etc;) and MES connectivity
Includes 1 Equipment
